| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
6193. A bilevel resist for ion beam lithography
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 2 |
6148. A combined electron and ion beam lithography system
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 3 |
A compact CMA spectrometer with axially integrated hybrid electron-ion gun for ISS, AES and sputter depth profile analysis
|
Gisler, E.
|
|
1986
|
36 |
10 |
p. 715-722
8 p.
|
artikel
|
| 4 |
6130. A comparison of single- and double-carrier injection in amorphous silicon alloys
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 5 |
6120. A comparison of sputtered Ni/Cr interface depth resolution as obtained by the quartz crystal microbalance mass-loss method and Auger spectroscopy
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 6 |
6106. Activation energies and frequency factors for the thermal desorption of He bound at vacancies in Mo
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 7 |
6089. A design analysis of intelligent, articulated vacuum processing systems
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 8 |
6127. Adhesion of titanium nitride coatings on high-speed steels
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 9 |
6209. A high-current hollow cathode as a source of intense line radiation in the VUV
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 10 |
6224. A high energy optically pumped laser system
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 11 |
6147. A high speed EBL column designed to minimized beam interactions
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 12 |
6196. A high-speed, high-precision electron beam lithography system (electron optics)
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 13 |
AirReel Cryoproducts range
|
AirReel Cryoproducts Ltd,
|
|
1986
|
36 |
10 |
p. 745-
1 p.
|
artikel
|
| 14 |
6082. All aluminum alloy, 800-mm-inner diameter gate valve using dual flat-face seals together with differential pumping
|
|
|
1986
|
36 |
10 |
p. 723-
1 p.
|
artikel
|
| 15 |
6200. Aluminum plasma etching process using vacuum systems without cold traps
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 16 |
Amorphous and amorphous-crystalline coatings of stainless steel with addition of refractory metals obtained by magnetron sputtering in vacuum
|
Grudeva, St.
|
|
1986
|
36 |
10 |
p. 599-603
5 p.
|
artikel
|
| 17 |
6182. An ac field-effect study of TCE-oxidised SiO2Si interface states
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 18 |
6247. Analysis of the transit time effect on the stroboscopic voltage contrast in the scanning electron microscope
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 19 |
6241. A new hemispherical retarding field energy analyser for quantitative voltage measurements in the SEM
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 20 |
6252. A new tool for studying epitaxy and interfaces: the XPS searchlight effect
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 21 |
6149. An experimental variable shaped electron beam lithography system
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 22 |
6099. An improved ion gauge with gold coated electrodes for reliable operation in reactive gases and for use as reference standard
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 23 |
6237. An investigation of oxide coated cathodes using SEM, AES, XPS and SIMS
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 24 |
6194. Anisotropic reactive ion etching technique of GaAs and AlGaAs materials for integrated optical device fabrication
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 25 |
Announcement
|
|
|
1986
|
36 |
10 |
p. 749-
1 p.
|
artikel
|
| 26 |
6084. An underground remotely controlled cryopump vacuum system utilizing 460-m long helium gas lines
|
|
|
1986
|
36 |
10 |
p. 723-
1 p.
|
artikel
|
| 27 |
6100. An updated review of getters and gettering
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 28 |
6151. Application of a focussed ion beam system to defect repair of VLSI masks
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 29 |
6133. Arcing from coated surfaces: test facility development and coating deposition using ion plating techniques
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 30 |
6192. Arsenic segregation to silicon/silicon oxide interfaces
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 31 |
6167. As+ implantation and transient anneling of MoSi2 thin films
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 32 |
6248. A simple high-voltage electron microscope voltage stabiliser using current-regulated corona tubes
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 33 |
6157. A special glow discharge source of positive ions
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 34 |
6122. A sputtering wind
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 35 |
6152. A stabilised flow control system for ion source gas from volatile liquids
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 36 |
6111. A technique for the production of a thin film with a linearly varying composition
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 37 |
6246. Auger electron spectroscopic study of the etching of cadmium telluride and cadmium manganese telluride
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 38 |
6345. Auger electron spectroscopy study alloy formation on MIS solar-cell metal surfaces
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 39 |
Author index of articles
|
|
|
1986
|
36 |
10 |
p. 703-
1 p.
|
artikel
|
| 40 |
6219. Automated pressure scanning of tunable dye lasers
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 41 |
6086. A versatile reactor for ultrahigh vacuum surface modification studies based on a reusable metal sealing system based on a reusable metal sealing system
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 42 |
Barrier optimization of metal-semiconductor junctions for high power Schottky rectifiers
|
Sarov, GA
|
|
1986
|
36 |
10 |
p. 677-681
5 p.
|
artikel
|
| 43 |
6146. Beam current stability from localized emission sites in field ion source
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 44 |
Bolt-on SIMS system
|
Rider, Gavin
|
|
1986
|
36 |
10 |
p. 744-
1 p.
|
artikel
|
| 45 |
6155. Broad-beam electron source
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 46 |
6232. Calibration of an energy dispersive spectroscopy k factor using Rutherford backscattering
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 47 |
6096. Calibration stability of two types of hot cathode ionization gauges
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 48 |
6221. Cavity length optimisation in acousto-optically mode-locked argonion lasers
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 49 |
6234. Characterization of NBS standard reference material 2135 for sputter depth profile analysis
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 50 |
6153. Charge and energy transfer in collisions of Cs+ ions with a cesiated W(110) surface
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 51 |
6225. Compact magnetic electron energy analyzer
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 52 |
6171. Comparative study oof intermetallic phases formed by direct ion implantation and radiation enhanced diffusion of tin in two kinds of steel
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 53 |
6123. Computer-controlled four-gun multisubstrate sputtering system for the preparation of composition-modulated structures
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 54 |
6217. Construction, operation, and enhancement of JET
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 55 |
Crystal orientation in CuSn-alloy coatings obtained by magnetron sputtering
|
Tzaneva, D.V.
|
|
1986
|
36 |
10 |
p. 605-607
3 p.
|
artikel
|
| 56 |
6216. Current characteristics of a high voltage 60 Hz crossed-field discharge
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 57 |
CVC announce a new UK manufacturing facility
|
|
|
1986
|
36 |
10 |
p. 745-
1 p.
|
artikel
|
| 58 |
6250. Dark current transients in HgI2 single crystals used as γ- and X-ray spectrometers
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 59 |
6132. Deposition and characterization of p-type cadmium telluride films
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 60 |
6093. Design and performance of a quartz oscillator vacuum gauge with a controller
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 61 |
6094. Design for improved resolution in a time-of-flight mass spectrometer using a supersonic beam and laser ionization source
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 62 |
6238. Device to cryofracture cultured cells for ion microscopy
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 63 |
6159. Diffusion of ion-implanted Ga in SiO2
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 64 |
6158. Distributions of light ions and foil destruction after irradiation of organic polymers
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 65 |
6160. Dose rate dependence of damage clustering during heavy ion irradiation in Si
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 66 |
Editorial: Software survey section
|
|
|
1986
|
36 |
10 |
p. I-IV
nvt p.
|
artikel
|
| 67 |
6187. Effect of an Ag or a Pd overlayer on the magnetic moment of a Fe film
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 68 |
6169. Effect of dopant implanation on the properties of TaSi2/poly-Si composite
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 69 |
6104. Effect of oxygen content in the vacuum annealing atmosphere on development of (100) [001] texture in thin Fe-3wt% Si strips
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 70 |
6129. Electrical characterization of plasma-grown oxides on gallium arsenide
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 71 |
6218. Electrical characterization of rf glow discharges using an operating impedance bridge
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 72 |
Electrical properties of hydrogen bombarded silicon surfaces
|
Barhdadi, A.
|
|
1986
|
36 |
10 |
p. 705-709
5 p.
|
artikel
|
| 73 |
6145. Electron beam prober for VLSI diagnosis
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 74 |
6177. Electron microscopy of epitaxial Si/CaF2/Si structures
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 75 |
6242. Electron spectroscopy of vacuum annealing effects on surfaces of some binary and ternary III–V semiconductors
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 76 |
6214. Energy and density measurements of sloshing ions in tandem-mirror-experiment upgrade using solid-state probe techniques
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 77 |
6161. Excess noise in ion beam irradiated polymer films
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 78 |
6141. Experimental performance of a microwave cavity plasma disk ion source
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 79 |
6205. Experimental study of the current penetration in a dense Z pinch
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 80 |
6142. Extraction of volume-produced H− ions
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 81 |
6083. Fermilab accumulator magnets vacuum chamber heating system
|
|
|
1986
|
36 |
10 |
p. 723-
1 p.
|
artikel
|
| 82 |
Field emission microscopy study of surface self diffusion and crystal growth of refractory metals in high electric fields
|
|
|
1986
|
36 |
10 |
p. 701-
1 p.
|
artikel
|
| 83 |
Formation and characterization of metal-semiconductor junctions
|
Tove, P.A.
|
|
1986
|
36 |
10 |
p. 659-667
9 p.
|
artikel
|
| 84 |
6188. Formation of metal-semiconductor interfaces: from the submonolayer regime to the real Schottky barrier
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 85 |
6128. Formation of ultrathin tungsten filaments via selective low-pressure chemical vapor deposition
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 86 |
Freeze drying botanical and zoological specimens
|
Edwards High Vacuum Ltd,
|
|
1986
|
36 |
10 |
p. 746-
1 p.
|
artikel
|
| 87 |
6178. GaAs growth in metal-organic MBE
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 88 |
6179. Gas source MBE of InP and Ga x In1−x P yAs1−y: materials properties and heterostructure lasers
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 89 |
6162. Gas trapping induced by argon implantation and irradiation of polymer films
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 90 |
General problems of high resolution lithography
|
Mladenov, Georgy M.
|
|
1986
|
36 |
10 |
p. 649-653
5 p.
|
artikel
|
| 91 |
6175. Germanium incorporation in heavily doped molecular beam epitaxy grown GaAs:Ge
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 92 |
6201. Glow discharge cleaning of stainless steel accelerator beam tubes
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 93 |
6240. High-resolution electron energy loss studies of Al and Ge chemisorption on silicon
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 94 |
6236. High resolution SIMS and neutron depth profiling of boron through oxide-silicon interfaces
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 95 |
6087. Hydrogen pumping with palladium membranes
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 96 |
Imaging of deformed metal surfaces using ion bombardment
|
Shelyakin, L.B.
|
|
1986
|
36 |
10 |
p. 631-634
4 p.
|
artikel
|
| 97 |
6172. Immobilization mechanism for ion-implanted deuterium in aluminum
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 98 |
6174. Indium ion implantation in Hg0.78 Cd0.22 Te/CdTe
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 99 |
Integrated washing/sterilizing plant help antibiotics production
|
Edwards High Vacuum Ltd,
|
|
1986
|
36 |
10 |
p. 747-
1 p.
|
artikel
|
| 100 |
6170. Interaction of slow charged particles (H+, He++) with solids
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 101 |
6185. Interactions between cleaved (Hg, Cd)Te surfaces and deposited overlayers of Al and In
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 102 |
6189. Interdiffusion and chemical ordering in composition-modulated Fe70Si30/Si amorphous thin films
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 103 |
6183. Interface depth resolution of Auger sputter profiled Ni/Cr interfaces: dependence on ion bombardment parameters
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 104 |
Introduction
|
Karpuzov, D.S.
|
|
1986
|
36 |
10 |
p. 583-
1 p.
|
artikel
|
| 105 |
Ion-assisted thin film deposition and applications
|
Martin, P.J.
|
|
1986
|
36 |
10 |
p. 585-590
6 p.
|
artikel
|
| 106 |
6195. Ion beam lithography: an investigation of resolution limits and sensitivities of ion-beam exposed PMMA
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 107 |
6114. Ion beam sputtering apparatus for fabrication of compositionally modulated materials
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 108 |
6135. Kinetics of Si(100) nitridation first stages by ammonia: electro-beam-induced thin film growth at room temperature
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 109 |
6203. Lanthanum hexaboride tapered filament in a plasma source
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 110 |
6228. Large probes in Tokamak scrape-off plasmas. The collisionless scrape-off layer: operation in the shadow of limiters or divertor plates
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 111 |
List of journals scanned
|
|
|
1986
|
36 |
10 |
p. 742-
1 p.
|
artikel
|
| 112 |
6097. Long-term stability of two types of hot cathode ionization gauges
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 113 |
Low power laser annealing of disordered semiconductors
|
Vitali, G.
|
|
1986
|
36 |
10 |
p. 643-648
6 p.
|
artikel
|
| 114 |
6215. Low-pressure flashlamps: influence of the wall ablation phenomena on their output characteristic
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 115 |
6098. Management of vacuum leak-detection processes, calibration, and standards
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 116 |
6197. Masked ion beam resist exposure using grid support stencil masks
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 117 |
6233. Mean excitation energy and electronic stopping power of solids
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 118 |
6244. Measurement: AES and XPS
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 119 |
6229. Measurement of the ionisation coefficients in binary and ternary mixtures of CO2, N2 and He
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 120 |
6134. Metal doped polymer films prepared by simultaneous plasma polymerization of tetrafluoromethane and evaporation of gold
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 121 |
Metallization for submicron LSI
|
Koleshko, V.M.
|
|
1986
|
36 |
10 |
p. 689-700
12 p.
|
artikel
|
| 122 |
6154. Metastable He+ (2S) production by a rf ion source
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 123 |
Modification of metal properties by ion plating of TiN
|
Zdanowski, J.
|
|
1986
|
36 |
10 |
p. 591-594
4 p.
|
artikel
|
| 124 |
6169. Modification of silicon structure during highly intensive Ar+ ion implantation
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 125 |
6206. Modulation instability of ionization waves
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 126 |
6109. Molecular beam distributions from high rate sources
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 127 |
6181. Molecular beam epitaxy beam flux modeling
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 128 |
6210. Monte Carlo and Boltzmann calculations of the density gradient expanded energy distribution functions of electron swarms in gases
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 129 |
6204. Multichannel heterodyne radiometer with computer control for electron cyclotron emission measurements of a tokomak plasma
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 130 |
6165. Near-surface microstructural modifications in low energy hydrogen ion bombarded silicon
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 131 |
6156. Neutral beam injector oxygen impurity measurements and concentration reduction via gettering processes
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 132 |
New Baratron pressure transducer from Chell Instruments solves nitride deposition problem
|
Chell Instruments Ltd,
|
|
1986
|
36 |
10 |
p. 745-
1 p.
|
artikel
|
| 133 |
New patents
|
|
|
1986
|
36 |
10 |
p. 751-766
16 p.
|
artikel
|
| 134 |
6131. New radio frequency technique for deposition of hard carbon films
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 135 |
6212. Non-equilibrium in low pressure rare gas discharges
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 136 |
Nucleation and growth of thin films
|
|
|
1986
|
36 |
10 |
p. 701-702
2 p.
|
artikel
|
| 137 |
On the interpretation of the titanium line in the appearance potential spectroscopy
|
Donchev, V.
|
|
1986
|
36 |
10 |
p. 655-657
3 p.
|
artikel
|
| 138 |
On the nature of the coverage corresponding to work-function minimum in metal-film systems
|
|
|
1986
|
36 |
10 |
p. 701-
1 p.
|
artikel
|
| 139 |
6108. Optical and crystalline inhomogeneity in evaporated zirconia films
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 140 |
6116. Optical properties of dense thin-film Si and Ge prepared by ion-beam sputtering
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 141 |
6143. Optimization of H− production in a magnetically filtered multicusp source
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 142 |
6222. Optogalvanic fluctuations in a waveguide CO2 laser
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 143 |
6199. Pattern profile control of polysilicon plasma etching
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 144 |
6243. Performance of a microchannel plate ion detector in the energy range 3–25 keV
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 145 |
6239. Performance of a new ion optics for quasisimultaneous secondary ion, secondary neutral, and residual gas mass spectrometry
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 146 |
6136. Plasma deposited hydrogenated carbon on GaAs and InP
|
|
|
1986
|
36 |
10 |
p. 729-
1 p.
|
artikel
|
| 147 |
6137. Practical laser-activated photoemissive electron source
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 148 |
6117. Preparation and electrochromic properties of rf-sputtered molybdenum oxide films
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 149 |
Preparing and applying thin film nickel temperature sensors
|
Stoychev, SM
|
|
1986
|
36 |
10 |
p. 683-685
3 p.
|
artikel
|
| 150 |
6138. Production and characterization of pulsed large-area homogenous electron beams
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 151 |
6207. Pulsed electrical discharges in helium gas
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 152 |
6249. Pulsed-jet etch chamber for preparing silicon samples for transmission electron microscopy
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 153 |
6090. Pumping of methane by a low power hot-cathode ion pump/gage
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 154 |
6088. Pumping systems
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 155 |
Quadrupole gas analyzers from Hiden Analytical Ltd.
|
|
|
1986
|
36 |
10 |
p. 743-
1 p.
|
artikel
|
| 156 |
6163. Rapid thermal annealing of dopants implanted into preamorphized silicon
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 157 |
Reduced contamination risk from lint free wipes
|
Ward, Alan
|
|
1986
|
36 |
10 |
p. 743-
1 p.
|
artikel
|
| 158 |
6126. Refractory metal silicide formation by sputtering a refractory metal on heated Si substrates
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 159 |
6227. Resolution of the Thomson spectrometer
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 160 |
6144. Reversal ion source: a new source of negative ion beams
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 161 |
6118. Secondary ion and sputtered neutral formation from oxygen loaded Si(100)
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 162 |
Secondary particle emission from metals under ion bombardment in the region of phase transitions—Part 2. Charged-particle and photon emission
|
Yurasova, V.E.
|
|
1986
|
36 |
10 |
p. 609-630
22 p.
|
artikel
|
| 163 |
6139. Selective focusing of different ion species produced by magnetically insulated ion beam diodes
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 164 |
6115. SiO2 planarization by two-step rf bias-sputtering
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 165 |
6112. Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 166 |
6176. Spin- and angle-resolved photoemission study of bcc-Co films grown on (110) GaAs by molecular beam epitaxy
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 167 |
Sputter deposition of multilayered structures for use in sputter depth profile calibration
|
Navinšek, B.
|
|
1986
|
36 |
10 |
p. 711-714
4 p.
|
artikel
|
| 168 |
6119. Sputter depositions of silicon film by a planar magnetron cathode equipped with three targets
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 169 |
6095. Stability improvement of TaN thin films used as resistive thermoconductive vacuum gauges
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 170 |
6223. Statistics of mode competition in a miniature TEA CO2 laser
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 171 |
6202. Status of TFTR with ohmic heating and neutral beam injection
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 172 |
6110. Structural properties of evaporated silicon films
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 173 |
6102. Studies of photon induced desorption of surface gas within an aluminium vacuum chamber using an X-ray source
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 174 |
6198. Submicron pattern fabrication by focused ion beams
|
|
|
1986
|
36 |
10 |
p. 736-
1 p.
|
artikel
|
| 175 |
6140. Subnanosecond bunching of a positron beam
|
|
|
1986
|
36 |
10 |
p. 730-
1 p.
|
artikel
|
| 176 |
6113. Superconducting properties of layered Nb0.53 Ti0.47/Ge structures prepared by dc sputtering
|
|
|
1986
|
36 |
10 |
p. 727-
1 p.
|
artikel
|
| 177 |
6208. Superdense high-temperature exploded-wire plasma observations in a high-current vacuum diode
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 178 |
6235. Surface analysis of contaminated GaAs: comparison of new laser-based techniques with SIMS
|
|
|
1986
|
36 |
10 |
p. 740-
1 p.
|
artikel
|
| 179 |
6213. Surface flashover of solid insulators in atmospheric air and in vacuum
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 180 |
6173. Surface preciption of boron nitrate on the surface of type 304]' stainless steels doped with nitrogen, boron, and cerium
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 181 |
6226. Synchronizable Q-switched, mode-locked, and cavity-dumped ruby laser for plasma diagnostics
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 182 |
Technical note on the ‘dynamic steam’ autoclave process
|
Edwards High Vacuum Ltd,
|
|
1986
|
36 |
10 |
p. 747-
1 p.
|
artikel
|
| 183 |
Technological considerations when obtaining high-precision resistors with controllable temperature coefficient of resistance
|
Stoychev, S.M.
|
|
1986
|
36 |
10 |
p. 687-688
2 p.
|
artikel
|
| 184 |
TEGAL announces custom equipment operation
|
Contact: Chris Ridge,
|
|
1986
|
36 |
10 |
p. 745-
1 p.
|
artikel
|
| 185 |
6220. Temperature rise induced by a cw laser beam revisited
|
|
|
1986
|
36 |
10 |
p. 738-
1 p.
|
artikel
|
| 186 |
6180. The dependence of RHEED oscillations on MBE growth parameters
|
|
|
1986
|
36 |
10 |
p. 734-
1 p.
|
artikel
|
| 187 |
The effect of inert gas ion bombardment on the oxidation of metal surfaces
|
Chenakin, S.P.
|
|
1986
|
36 |
10 |
p. 635-641
7 p.
|
artikel
|
| 188 |
6121. The effects of hydrogenation on the properties of ion beam sputter deposited amorphous carbon
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 189 |
The enhanced threshold level detection mode
|
Hiden Analytical Ltd,
|
|
1986
|
36 |
10 |
p. 743-
1 p.
|
artikel
|
| 190 |
6125. The influence of discharge current on the intrinsic stress in Mo films deposited using cylindrical and planar magnetron sputtering sources
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 191 |
The mid mode for trend analysis
|
|
|
1986
|
36 |
10 |
p. 743-
1 p.
|
artikel
|
| 192 |
6186. Thermal reaction of gold metallization on InP
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 193 |
6211. The space distribution of the electron beam in a glow discharge electron gun and its correlation with the cathode geometry
|
|
|
1986
|
36 |
10 |
p. 737-
1 p.
|
artikel
|
| 194 |
6091. The spinning rotor gauge
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
| 195 |
6168. The trapping of deuterium in argon-implanted nickle
|
|
|
1986
|
36 |
10 |
p. 733-
1 p.
|
artikel
|
| 196 |
6190. The use of mixed alloy contacts to engineer the interfaces and electrical characteristics of metal-InP contacts
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 197 |
6101. The use of the exponential tempering function in multiple order desorption analysis
|
|
|
1986
|
36 |
10 |
p. 725-
1 p.
|
artikel
|
| 198 |
The versatile cracking pattern mode
|
|
|
1986
|
36 |
10 |
p. 743-
1 p.
|
artikel
|
| 199 |
The very new dual mass/pressure mode
|
|
|
1986
|
36 |
10 |
p. 743-
1 p.
|
artikel
|
| 200 |
6184. Thin film deposition for permeability increase of gas being implanted (theoretical consideration)
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 201 |
Thin films of rare-earth metal silicides in microelectronics
|
Koleshko, V.M.
|
|
1986
|
36 |
10 |
p. 669-676
8 p.
|
artikel
|
| 202 |
Titanium carbide thin films obtained by reactive magnetron sputtering
|
Georgiev, G.
|
|
1986
|
36 |
10 |
p. 595-597
3 p.
|
artikel
|
| 203 |
6231. Tokamak Fusion Test Reactor horizontal high-resolution Bragg X-ray spectrometer
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 204 |
6230. Tokamak ion temperature and poloidal field diagnostics using 3-MeV protons
|
|
|
1986
|
36 |
10 |
p. 739-
1 p.
|
artikel
|
| 205 |
6107. Ultrahigh-vacuum cryostat and sample manipulator for operation between 5 and 800 K
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 206 |
Ultrahigh vacuum hybrid stepper motors
|
AML Microelectronics Ltd,
|
|
1986
|
36 |
10 |
p. 744-
1 p.
|
artikel
|
| 207 |
6124. Use of TiSi2 to form metal-oxide-silicon field effect transistors with self-aligned source/drain and gate electrode
|
|
|
1986
|
36 |
10 |
p. 728-
1 p.
|
artikel
|
| 208 |
6164. UV laser incorporation of dopants into silicon: comparison of two processes
|
|
|
1986
|
36 |
10 |
p. 732-
1 p.
|
artikel
|
| 209 |
6105. UV/ozone cleaning of surfaces
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 210 |
Vacuum evaporation sources—filaments, boats, crucibles, baskets, chrome-plated rods
|
Busch (UK) Ltd,
|
|
1986
|
36 |
10 |
p. 744-
1 p.
|
artikel
|
| 211 |
Vacuum publications Balzers Vacuum News March 1986 issue No 50 (also Coating Materials Price List)
|
Balzers High Vacuum Ltd,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 212 |
Vacuum publications CVC Catalogue on High Vacuum Deposition Systems
|
CVC Scientific Products Ltd,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 213 |
Vacuum publications Duravac Vacuum Fluids 1986 Price List
|
Duravac,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 214 |
Vacuum publications Granville-Phillips High Vacuum Instrumentation Ltd
|
Testbourne Ltd,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 215 |
Vacuum publications Kratos Catalogue 48 Components for surface analysis
|
Surface Analysis Division, Kratos Analytical,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 216 |
Vacuum publications Montedison UK Ltd
|
Mr K Jones, Montedison UK Ltd,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 217 |
Vacuum publications Plasma Technology Plasma News 1986
|
Plasma Technology UK Ltd,
|
|
1986
|
36 |
10 |
p. 748-
1 p.
|
artikel
|
| 218 |
6085. Vacuum systems for vacuum microbalances
|
|
|
1986
|
36 |
10 |
p. 723-
1 p.
|
artikel
|
| 219 |
Varian Elettrorava reach agreement
|
Varian SpA,
|
|
1986
|
36 |
10 |
p. 745-
1 p.
|
artikel
|
| 220 |
6191. Vibrational study of the SiO2/Si interface by high resolution electron energy loss spectroscopy
|
|
|
1986
|
36 |
10 |
p. 735-
1 p.
|
artikel
|
| 221 |
6103. Vibrations of CO chemisorbed on metal surfaces: Cluster model studies
|
|
|
1986
|
36 |
10 |
p. 726-
1 p.
|
artikel
|
| 222 |
6251. X-ray photoelectron spectroscopy studies of thin films of TiN x having different annealing histories
|
|
|
1986
|
36 |
10 |
p. 741-
1 p.
|
artikel
|
| 223 |
6150. Yaw corrected precision X-Y stage for high-throughput electron-beam lithography systems
|
|
|
1986
|
36 |
10 |
p. 731-
1 p.
|
artikel
|
| 224 |
6092. Zero stability of spinning rotor vacuum gages
|
|
|
1986
|
36 |
10 |
p. 724-
1 p.
|
artikel
|
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