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Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering |
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Titel: |
Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering |
Auteur: |
Krause, Bärbel Darma, Susan Kaufholz, Marthe Gräfe, Hans-Hellmuth Ulrich, Sven Mantilla, Miguel Weigel, Ralf Rembold, Steffen Baumbach, Tilo |
Verschenen in: |
Journal of synchrotron radiation |
Paginering: |
Jaargang 19 (2012) nr. 2 pagina's 216-222 |
Jaar: |
2012-03-01 |
Inhoud: |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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