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                                       Details for article 10 of 21 found articles
 
 
  Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering
 
 
Title: Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering
Author: Krause, Bärbel
Darma, Susan
Kaufholz, Marthe
Gräfe, Hans-Hellmuth
Ulrich, Sven
Mantilla, Miguel
Weigel, Ralf
Rembold, Steffen
Baumbach, Tilo
Appeared in: Journal of synchrotron radiation
Paging: Volume 19 (2012) nr. 2 pages 216-222
Year: 2012-03-01
Contents:
Publisher: International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 10 of 21 found articles
 
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