Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Titel:
Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Auteur:
Suh, Hyo Seon Chen, Xuanxuan Rincon-Delgadillo, Paulina A. Jiang, Zhang Strzalka, Joseph Wang, Jin Chen, Wei Gronheid, Roel de Pablo, Juan J. Ferrier, Nicola Doxastakis, Manolis Nealey, Paul F.
Verschenen in:
Journal of applied crystallography
Paginering:
Jaargang 49 (2016) nr. 3 pagina's 823-834
Jaar:
2016-06-01
Inhoud:
Uitgever:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England