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                                       Details for article 40 of 40 found articles
 
 
  X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via
 
 
Title: X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via
Author: Todt, J.
Hammer, H.
Sartory, B.
Burghammer, M.
Kraft, J.
Daniel, R.
Keckes, J.
Defregger, S.
Appeared in: Journal of applied crystallography
Paging: Volume 49 (2016) nr. 1 pages 182-187
Year: 2016-02-01
Contents:
Publisher: International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 40 of 40 found articles
 
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