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X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via |
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Title: |
X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via |
Author: |
Todt, J. Hammer, H. Sartory, B. Burghammer, M. Kraft, J. Daniel, R. Keckes, J. Defregger, S. |
Appeared in: |
Journal of applied crystallography |
Paging: |
Volume 49 (2016) nr. 1 pages 182-187 |
Year: |
2016-02-01 |
Contents: |
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Publisher: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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