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                                       Details for article 30 of 33 found articles
 
 
  Surface morphology of sputtered Ta2O5 thin films on Si substrates from X-ray reflectivity at a fixed angle
 
 
Title: Surface morphology of sputtered Ta2O5 thin films on Si substrates from X-ray reflectivity at a fixed angle
Author: Lee, Hsin-Yi
Huang, Tzu-Wen
Lee, Chih-Hao
Hsieh, Yung-Wei
Appeared in: Journal of applied crystallography
Paging: Volume 41 (2008) nr. 2 pages 356-362
Year: 2008-04-01
Contents:
Publisher: International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 30 of 33 found articles
 
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