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Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging |
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Titel: |
Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging |
Auteur: |
Ferrari, Claudio Pernot, Petra Mikulík, Petr Helfen, Lukas Verdi, Nicola Baumbach, Tilo Lübbert, Daniel Korytár, Dušan |
Verschenen in: |
Journal of applied crystallography |
Paginering: |
Jaargang 38 (2005) nr. 1 pagina's 91-96 |
Jaar: |
2005-02-01 |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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