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Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging |
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Title: |
Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging |
Author: |
Ferrari, Claudio Pernot, Petra Mikulík, Petr Helfen, Lukas Verdi, Nicola Baumbach, Tilo Lübbert, Daniel Korytár, Dušan |
Appeared in: |
Journal of applied crystallography |
Paging: |
Volume 38 (2005) nr. 1 pages 91-96 |
Year: |
2005-02-01 |
Contents: |
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Publisher: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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