Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
Title:
Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
Author:
Cembali, F. Fabbri, R. Servidori, M. Zani, A. Basile, G. Cavagnero, G. Bergamin, A. Zosi, G.
Appeared in:
Journal of applied crystallography
Paging:
Volume 25 (1992) nr. 3 pages 424-431
Year:
1992-06-01
Contents:
Publisher:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England