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                                       Details for article 18 of 24 found articles
 
 
  Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
 
 
Title: Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
Author: Cembali, F.
Fabbri, R.
Servidori, M.
Zani, A.
Basile, G.
Cavagnero, G.
Bergamin, A.
Zosi, G.
Appeared in: Journal of applied crystallography
Paging: Volume 25 (1992) nr. 3 pages 424-431
Year: 1992-06-01
Contents:
Publisher: International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 18 of 24 found articles
 
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