Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
Titel:
Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
Auteur:
Cembali, F. Fabbri, R. Servidori, M. Zani, A. Basile, G. Cavagnero, G. Bergamin, A. Zosi, G.
Verschenen in:
Journal of applied crystallography
Paginering:
Jaargang 25 (1992) nr. 3 pagina's 424-431
Jaar:
1992-06-01
Inhoud:
Uitgever:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England