Investigation of Vibrational Bonding Modes in Hydrogenated Silicon Thin Films Near the Amorphous-to-Nanocrystalline Transition via Argon-Diluted Silane PECVD
Titel:
Investigation of Vibrational Bonding Modes in Hydrogenated Silicon Thin Films Near the Amorphous-to-Nanocrystalline Transition via Argon-Diluted Silane PECVD