|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 17 of 20 found articles
| Title: |
Role of CH2I2 catalysis in chemically enhanced MOCVD Cu process: Nature of superfilling in copper thin film growth |
| Author: |
Pyo, Sung Gyu |
| Appeared in: |
Metals and materials international |
| Paging: | Volume 14 (2008) nr. 6 pages 767-772 |
| Year: |
2008 |
| Contents: | |
| Publisher: |
The Korean Institute of Metals and Materials, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 20 found articles
| << previous | next >> |