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Journal description
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Details for article 16 of 20 found articles
| Title: |
Prediction of electroplated copper protrusion profiles in trench patterns using an empirical equation |
| Author: |
Pyo, Sung Gyu Lee, D. W. Kim, Sibum |
| Appeared in: |
Metals and materials international |
| Paging: | Volume 14 (2008) nr. 6 pages 773-778 |
| Year: |
2008 |
| Contents: | |
| Publisher: |
The Korean Institute of Metals and Materials, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 20 found articles
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