|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 3 of 61 found articles
| Title: |
A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry |
| Author: |
Zhao, J. M. Yang, P. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 18 (2012) nr. 9-10 pages 1455-1461 |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 61 found articles
| << previous | next >> |