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Journal description
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Details for article 14 of 18 found articles
| Title: |
“Plug-up”–a new concept for fabricating SOI MEMS devices |
| Author: |
Kiihamäki, J. Dekker, J. Pekko, P. Kattelus, H. Sillanpää, T. Mattila, T. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 10 (2004) nr. 5 pages 346-350 |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 18 found articles
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