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                                       Details for article 11 of 19 found articles
 
 
  Laser Induced Stress Wave Thermometry for In-situ Temperature and Thickness Characterization of Single Crystalline Silicon Wafer: Part I—Theory and Apparatus
 
 
Title: Laser Induced Stress Wave Thermometry for In-situ Temperature and Thickness Characterization of Single Crystalline Silicon Wafer: Part I—Theory and Apparatus
Author: Vedantham, V.
Suh, C. S.
Chona, R.
Appeared in: Experimental mechanics
Paging: Volume 51 (2010) nr. 7 pages 1103-1114
Year: 2010
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 11 of 19 found articles
 
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