|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 7 of 12 found articles
| Title: |
Dynamics of Stress in Films of Metals on Silicon During Vacuum Heat Treatment |
| Author: |
Dzhuplin, V. N. Klimin, V. S. Morozova, Yu. V. Rezvan, A. A. Vakulov, Z. E. Ageev, O. A. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 50 () nr. 6 pages 412-419 |
| Year: |
2021-12-16 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 12 found articles
| << previous | next >> |