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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 7 of 9 found articles
| Title: |
Modification of electronic properties of the surface of (100) silicon crystals under microwave plasma micromachining |
| Author: |
Yafarov, R. K. Klimova, S. A. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 43 (2014) nr. 4 pages 299-307 |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 9 found articles
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