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Journal description
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Details for article 3 of 20 found articles
| Title: |
DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation |
| Author: |
V. P. Popov I. V. Antonova A. A. Frantsuzov L. N. Safronov A. I. Popov O. V. Naumova A. Kh. Antonenko D. V. Kilanov I. V. Mironova |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 31 (2002) nr. 4 pages 6 p. |
| Year: |
2002-07/08-/08 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 20 found articles
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