Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering
Titel:
Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering
Auteur:
Bakri, A. S. Nafarizal, N. Abu Bakar, A. S. Megat Hasnan, M. M. I. Raship, N. A. Wan Omar, W. I. Azman, Z. Mohamed Ali, R. A. Majid, W. H. Abd Ahmad, M. K. Aldalbahi, A.
Verschenen in:
Journal of materials science. Materials in electronics