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Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure |
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Titel: |
Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure |
Auteur: |
Gupta, Nidhi Dutta, Shankar Panchal, Abha Yadav, Isha Kumar, Surender Parmar, Yashoda Vanjari, Siva Rama Krishna Jain, K. K. Bhattacharya, D. K. |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 30 (2019) nr. 16 pagina's 15705-15714 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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