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Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films |
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Titel: |
Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films |
Auteur: |
Liu, Zhonghao Guo, Yuting Li, Shang Chen, Yanxiang Deng, Ke Liu, Hulin Guo, Shuren Dong, Xuanpu Cao, Huatang |
Verschenen in: |
Next materials |
Paginering: |
Jaargang 6 () nr. C pagina's p. |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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