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Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films |
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Title: |
Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films |
Author: |
Liu, Zhonghao Guo, Yuting Li, Shang Chen, Yanxiang Deng, Ke Liu, Hulin Guo, Shuren Dong, Xuanpu Cao, Huatang |
Appeared in: |
Next materials |
Paging: |
Volume 6 () nr. C pages p. |
Year: |
2025 |
Contents: |
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Publisher: |
The Authors |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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