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Controlling the beam angle spread of carbon implantation for improvement of bin map defect in V-NAND flash memory |
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Titel: |
Controlling the beam angle spread of carbon implantation for improvement of bin map defect in V-NAND flash memory |
Auteur: |
Yang, Gui-Fu Jang, Sung-Hwan JANG, SUNG-UK Lee, Tae-Hyun Kim, Da-Hye Huh, Jung-Ho Yoo, Seok-Hyun |
Verschenen in: |
Memories, materials, devices, circuits and systems |
Paginering: |
Jaargang 4 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
The Author(s) |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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