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Super-resolution fluorescence microscopy on E-beam resist film during electron beam exposure for mask patterning process |
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Titel: |
Super-resolution fluorescence microscopy on E-beam resist film during electron beam exposure for mask patterning process |
Auteur: |
Bae, Sukjong de Jong, Flip Nuyts, Rik Sasikumar, Rahul Yuan, Haifeng Min, Seongjune Choi, Jin Lee, Sanghee Park, Joonsoo Hofkens, Johan |
Verschenen in: |
Micro and nano engineering |
Paginering: |
Jaargang 19 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
The Author(s) |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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