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A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure |
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Titel: |
A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure |
Auteur: |
Gao, Wendi Qiao, Zhixia Han, Xiangguang Wang, Xiaozhang Shakoor, Adnan Liu, Cunlang Lu, Dejiang Yang, Ping Zhao, Libo Wang, Yonglu Wang, Jiuhong Jiang, Zhuangde Sun, Dong |
Verschenen in: |
Engineering |
Paginering: |
Jaargang 21 () nr. C pagina's 61-74 |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
THE AUTHORS |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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