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                                       Details for article 2 of 28 found articles
 
 
  A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure
 
 
Title: A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure
Author: Gao, Wendi
Qiao, Zhixia
Han, Xiangguang
Wang, Xiaozhang
Shakoor, Adnan
Liu, Cunlang
Lu, Dejiang
Yang, Ping
Zhao, Libo
Wang, Yonglu
Wang, Jiuhong
Jiang, Zhuangde
Sun, Dong
Appeared in: Engineering
Paging: Volume 21 () nr. C pages 61-74
Year: 2023
Contents:
Publisher: THE AUTHORS
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 28 found articles
 
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