Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing
Titel:
Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing
Auteur:
Mattinen, Miika King, Peter J. Khriachtchev, Leonid Heikkilä, Mikko J. Fleming, Ben Rushworth, Simon Mizohata, Kenichiro Meinander, Kristoffer Räisänen, Jyrki Ritala, Mikko Leskelä, Markku