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Details for article 2 of 14 found articles
| Title: |
Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing |
| Author: |
Mattinen, Miika King, Peter J. Khriachtchev, Leonid Heikkilä, Mikko J. Fleming, Ben Rushworth, Simon Mizohata, Kenichiro Meinander, Kristoffer Räisänen, Jyrki Ritala, Mikko Leskelä, Markku |
| Appeared in: |
Materials today chemistry |
| Paging: | Volume 9 () nr. C pages 17-27 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 14 found articles
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