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Design and optimization of an integrated MEMS gas chamber with high transmissivity |
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Title: |
Design and optimization of an integrated MEMS gas chamber with high transmissivity |
Author: |
Jing, Yang Yuhua, Cheng Yupeng, Yuan Xiaofei, Li Zuwei, Zhang Ming, Xu Dengpan, Wang Jiangdong, Mu Yong, Mei Yuzhe, Zhang |
Appeared in: |
Digital communications and networks |
Paging: |
Volume 7 () nr. 1 pages 82-91 |
Year: |
2021 |
Contents: |
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Publisher: |
Chongqing University of Posts and Telecommunications |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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