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Design and optimization of an integrated MEMS gas chamber with high transmissivity |
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Titel: |
Design and optimization of an integrated MEMS gas chamber with high transmissivity |
Auteur: |
Jing, Yang Yuhua, Cheng Yupeng, Yuan Xiaofei, Li Zuwei, Zhang Ming, Xu Dengpan, Wang Jiangdong, Mu Yong, Mei Yuzhe, Zhang |
Verschenen in: |
Digital communications and networks |
Paginering: |
Jaargang 7 () nr. 1 pagina's 82-91 |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
Chongqing University of Posts and Telecommunications |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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