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Investigate on material removal of 3C-SiC crystals in nano-polishing via molecular dynamics |
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Titel: |
Investigate on material removal of 3C-SiC crystals in nano-polishing via molecular dynamics |
Auteur: |
Liu, Huan Zhao, Pengyue Wu, Dongxu Li, Duo Wang, Shunbo Gao, Xifeng Wang, Dawei Wu, Xin Huang, Shujun Tan, Jiubin |
Verschenen in: |
Journal of manufacturing processes |
Paginering: |
Jaargang 120 () nr. C pagina's 467-477 |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
The Society of Manufacturing Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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