Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs
Titel:
Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs
Auteur:
Johnson, Derek W. Yum, Jung Hwan Hudnall, Todd W. Mushinski, Ryan M. Bielawski, Christopher W. Roberts, John C. Wang, Wei-E Banerjee, Sanjay K. Harris, H. Rusty