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Journal description
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Details for article 11 of 22 found articles
| Title: |
Effects of Thermal Annealing on the Formation
of Buried β-SiC by Ion Implantation |
| Author: |
Poudel, P. R. Rout, B. Diercks, D. R. Paramo, J. A. Strzhemechny, Y. M. Mcdaniel, F. D. |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 40 (2011) nr. 9 pages 1998-2003 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 22 found articles
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