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                                       Details for article 39 of 40 found articles
 
 
  Thickness determination of low doped SiC epi-films on highly doped SiC substrates
 
 
Title: Thickness determination of low doped SiC epi-films on highly doped SiC substrates
Author: Macmillan, M. F.
Henry, A.
Janzén, E.
Appeared in: Journal of electronic materials
Paging: Volume 27 (1998) nr. 4 pages 300-303
Year: 1998
Contents:
Publisher: Springer-Verlag, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 39 of 40 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands