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Effect of the film thickness on the crystal structure and ferroelectric properties of (Hf0.5Zr0.5)O2 thin films deposited on various substrates |
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Titel: |
Effect of the film thickness on the crystal structure and ferroelectric properties of (Hf0.5Zr0.5)O2 thin films deposited on various substrates |
Auteur: |
Shiraishi, Takahisa Katayama, Kiliha Yokouchi, Tatsuhiko Shimizu, Takao Oikawa, Takahiro Sakata, Osami Uchida, Hiroshi Imai, Yasuhiko Kiguchi, Takanori Konno, Toyohiko J. Funakubo, Hiroshi |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 70 (2017) nr. C pagina's 7 p. |
Jaar: |
2017 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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