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Journal description
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Details for article 29 of 52 found articles
| Title: |
In-line monitoring of strain distribution using high resolution X-ray Reciprocal space mapping into 20nm SiGe pMOS |
| Author: |
Durand, Aurèle Kaufling, Melissa Le-Cunff, Delphine Rouchon, Denis Gergaud, Patrice |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 70 (2017) nr. C pages 6 p. |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 52 found articles
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