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Investigating the physical mechanism of ion-slicing in AlN and hetero-integrating AlN thin film on Si(100) substrate |
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Titel: |
Investigating the physical mechanism of ion-slicing in AlN and hetero-integrating AlN thin film on Si(100) substrate |
Auteur: |
Qin, Qingcheng Shi, Hangning Yuan, Ye Ding, Jiaxin Yi, Ailun Xu, Wenhui Zhou, Min Zhang, Jian Lu, Tongxin Yang, Yi You, Tiangui Wang, Xinqiang Ou, Xin |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 176 () nr. C pagina's p. |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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