|
Effects of oxygen vacancies on ferroelectric characteristics of RF-sputtered Hf0.5Zr0.5O2 |
|
|
|
Titel: |
Effects of oxygen vacancies on ferroelectric characteristics of RF-sputtered Hf0.5Zr0.5O2 |
Auteur: |
Han, Changhyeon Kwon, Ki Ryun Kim, Jeonghan Yim, Jiyong Kim, Sangwoo Park, Eun Chan You, Ji Won Jeong, Soi Choi, Rino Kwon, Daewoong |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 160 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
|
Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|