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Journal description
All volumes of the corresponding journal
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Details for article 47 of 52 found articles
| Title: |
The effect of contact types on SiC polishing process |
| Author: |
Zhou, Yuqi Huang, Yuhua Li, Jinming Zhu, Fulong |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 147 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 47 of 52 found articles
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