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Ammonia-induced surface microstructure reconstruction on ACIGS thin film at room temperature |
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Titel: |
Ammonia-induced surface microstructure reconstruction on ACIGS thin film at room temperature |
Auteur: |
Zhang, Yunxiang Zhang, Yongheng Chen, Xiao Wang, Sijia Gao, Qing Wu, Mengjie Wang, Zhongjie Ao, Jianping Sun, Yun Liu, Wei Zhang, Qinfang |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 140 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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