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Ammonia-induced surface microstructure reconstruction on ACIGS thin film at room temperature |
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Title: |
Ammonia-induced surface microstructure reconstruction on ACIGS thin film at room temperature |
Author: |
Zhang, Yunxiang Zhang, Yongheng Chen, Xiao Wang, Sijia Gao, Qing Wu, Mengjie Wang, Zhongjie Ao, Jianping Sun, Yun Liu, Wei Zhang, Qinfang |
Appeared in: |
Materials science in semiconductor processing |
Paging: |
Volume 140 () nr. C pages p. |
Year: |
2022 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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