Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
Titel:
Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
Auteur:
Karimi Aghda, Soheil Music, Denis Unutulmazsoy, Yeliz Sua, Heng Han Mráz, Stanislav Hans, Marcus Primetzhofer, Daniel Anders, André Schneider, Jochen M.