Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
Title:
Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
Author:
Karimi Aghda, Soheil Music, Denis Unutulmazsoy, Yeliz Sua, Heng Han Mráz, Stanislav Hans, Marcus Primetzhofer, Daniel Anders, André Schneider, Jochen M.