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  Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
 
 
Title: Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
Author: Karimi Aghda, Soheil
Music, Denis
Unutulmazsoy, Yeliz
Sua, Heng Han
Mráz, Stanislav
Hans, Marcus
Primetzhofer, Daniel
Anders, André
Schneider, Jochen M.
Appeared in: Acta Materialia
Paging: Volume 214 () nr. C pages p.
Year: 2021
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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