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Journal description
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Details for article 53 of 70 found articles
| Title: |
Spectroscopic investigation of N2H2ArTiCl4-assisted chemical vapour deposition discharge for plasma of TiN |
| Author: |
Rie, K.-T. Wöhle, J. |
| Appeared in: |
Materials science and engineering. A, Structural materials: properties, microstructure and processing |
| Paging: | Volume 139 (1991) nr. C pages 4 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 53 of 70 found articles
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