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Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II |
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Titel: |
Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II |
Auteur: |
Streli, C. Pepponi, G. Wobrauschek, P. Beckhoff, B. Ulm, G. Pahlke, S. Fabry, L. Ehmann, Th. Kanngießer, B. Malzer, W. Jark, W. |
Verschenen in: |
Spectrochimica acta. Part B, Atomic spectroscopy |
Paginering: |
Jaargang 58 (2003) nr. 12 pagina's 9 p. |
Jaar: |
2003 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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