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The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability |
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Titel: |
The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability |
Auteur: |
Alcock, S.G. Sawhney, K.J.S. Scott, S. Pedersen, U. Walton, R. Siewert, F. Zeschke, T. Senf, F. Noll, T. Lammert, H. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 616 (2010) nr. 2-3 pagina's 5 p. |
Jaar: |
2010 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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