Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler
Titel:
Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler
Auteur:
Yashchuk, Valeriy V. Barber, Samuel Domning, Edward E. Kirschman, Jonathan L. Morrison, Gregory Y. Smith, Brian V. Siewert, Frank Zeschke, Thomas Geckeler, Ralf Just, Andreas
Verschenen in:
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment