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Chemical characterization of SiC x N y nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS |
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Titel: |
Chemical characterization of SiC x N y nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS |
Auteur: |
Baake, O. Fainer, N.I. Hoffmann, P. Kosinova, M.L. Rumyantsev, Yu.M. Trunova, V.A. Klein, A. Ensinger, W. Pollakowski, B. Beckhoff, B. Ulm, G. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 603 (2009) nr. 1-2 pagina's 4 p. |
Jaar: |
2009 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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