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A comparison study of mechanical change and chemical disorder in 4H-SiC irradiated with Si5+ and He2+ at room temperature |
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Titel: |
A comparison study of mechanical change and chemical disorder in 4H-SiC irradiated with Si5+ and He2+ at room temperature |
Auteur: |
He, Xiaoxun Chen, Limin Li, Junhan Peng, Dingping Zhang, Tongmin Li, Jun Liao, Qing Pan, Qi Xu, Shuai Li, Bingsheng |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 512 () nr. C pagina's 60-65 |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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